摘要
本文设计了一种新型硅基ＭＥＭＳ集成光强调制型光波导加速度传感器，在同一硅片上集成了分束器、悬臂梁、质量块、光波导、光探测器等元件，解决了光纤传感器向微型化发展时遇到的装配困难及长期稳定性差等问题，讨论了利用现有工艺在硅基片上实现ＭＥＭＳ集成光波导加速度传感器的可行性。
In this paper, a new type Si based MEMS integrated waveguide accelerometer is designed and its reality probability is discussed. The waveguide, photodetector, cantilever, mass is integrated in one chip, this new design should solve the problems which the optic fiber sensor will concerned, such as the mechanical assembly procedures and mechanical stability over long periods.
