摘要
从两组元或三组元等离子体的一些基本性质出发，分析了等离子体在超大规模集成电路生产、扁平显示器技术、光导纤维生产和未来光计算机芯片制造、废物处理、新材料制备等中十分诱人的应用前景。
Prospective applications of plasma in the production of ultra large scale integrated circuits,the technology of flat panel displays,the manufacturing of optical fibers and (future) optical computing chips,waste disposal,and the preparation of various new functional materials are surveyed on the basis of its fundamental properties.
出处
《核聚变与等离子体物理》
CAS
CSCD
北大核心
1998年第4期53-58,共6页
Nuclear Fusion and Plasma Physics
