摘要
就Ｄｉｇｉｓｏｒｂ２６００型物理吸附仪的真空系统拟出了表格形式的基本检漏步骤，并在此基础上详细介绍了几例特殊真空故障的查找、分析及解决方法。
The digisorb 2600 vacuum system is introduced briefly, the table of leak-check procedure of each value is made. Based on the table, several particular vacuum faults are analyzed and studied deeply, and the methods to resolve these faults are given.
出处
《分析测试技术与仪器》
CAS
1998年第4期250-254,共5页
Analysis and Testing Technology and Instruments
