摘要
Single-fundamental-mode photonic crystal （PhC） vertical cavity surface emitting lasers （VCSEL） are produced and their single-fundamental-mode performances are investigated and demonstrated. A two-dimensional PhC with single-point-defect structure is fabricated using UV photolithography and inductive coupled plasma reactive ion etching on the surface of the VCSEL＇s top distributed Bragg-reflector. The PhC VCSEL maintains single-fundamental-mode operating with output power 1.7 mW and threshold current 2.5 mA. The full width half maximum of the lasing spectrum is less than 0.1 nm, the far field divergence angle is less than 10° and the side mode suppression ratio is over 35 dB. The device characteristics are analyzed based on the effective index model of the photonic crystal fiber. The experimental results agree well with the theoretical expectation.
Single-fundamental-mode photonic crystal （PhC） vertical cavity surface emitting lasers （VCSEL） are produced and their single-fundamental-mode performances are investigated and demonstrated. A two-dimensional PhC with single-point-defect structure is fabricated using UV photolithography and inductive coupled plasma reactive ion etching on the surface of the VCSEL＇s top distributed Bragg-reflector. The PhC VCSEL maintains single-fundamental-mode operating with output power 1.7 mW and threshold current 2.5 mA. The full width half maximum of the lasing spectrum is less than 0.1 nm, the far field divergence angle is less than 10° and the side mode suppression ratio is over 35 dB. The device characteristics are analyzed based on the effective index model of the photonic crystal fiber. The experimental results agree well with the theoretical expectation.
基金
Supported by the National High Technology Research and Development Program of China under Grant Nos 2008AA03Z402 and 2009AA03Z412, the Nation Natural Foundation of China under Grant Nos 60807010, 60736037 and 60887030, the National Basic Research Program of China under Grant No 2009CB320300, and the Beijing Natural Science Foundation of Beijing under Grant No 4092007.
