摘要
离子束增强沉积技术是近年在离子注入技术基础上发展的新型材料表面改性技术，本文简要介绍多功能离子束增强沉积设备和应用技术研究，设备具有金属离子注入、气体离子注入、离子束增强沉积、磁控溅射沉积功能，进行材料表面改性和制备各种材料薄膜科学研究。
Abstract Ion beam enhanced technology is an advanced technology, which is used for material surface modification. In this paper, it is introduced that an ion beam enhanced deposition equipment and some utility technologies. The main functions of the equipment include metal ion implanting, gas ion implanting, ion beam enhanced deposition, magnetron sputtering deposition and surface modification of material. It can achieve preparing of films and researching on material surface modification.
出处
《真空》
CAS
北大核心
1998年第6期40-43,共4页
Vacuum
