摘要
离子渗金属中,工件表层合金贫化主要通过两种机构发生。一是因畸变层与非畸变层的扩散系数不同,结果由扩散导致交界区出现原子富集;二是离子轰击的溅射作用和溅射衰减效应使得出现内层的浓度峰。从扩散的原子理论,应用溅射比率和衰减因子的概念导出双层辉光离子渗金属条件下的扩散方程。提出几种减轻和消除贫化的方法。
In double glow plasma surface alloying(DGPSA), the alloy poorness in
surface layer of the workpiece is mainly caused by two mechanisms. For one thing, it is the high diffusivity in the distortion zone and the low diffusivity in the undistortion zone that encourages atoms to enrich at interface zone. For another thing, the sputter effect of ion bombardment and the sputter attenuation effect help to bring about the enrichment of interface zone. This paper de-rives the diffusion equation for DGPSA from the atomic theory of diffusion by applying the ideas about sputter rate and attenuation factor, and suggests some methods to mitigate or eliminate the poorness.
出处
《材料导报》
EI
CAS
CSCD
北大核心
1998年第4期28-30,17,共4页
Materials Reports