摘要
以四氯化锡和氟化铵为原料,异丙醇和水为溶剂,采用喷雾热解法,在载玻片上制备氟掺杂二氧化锡导电薄膜(fluorine-doped tin oxide,FTO)。研究了四氯化锡浓度、氟化铵浓度、双氧水浓度、异丙醇与水的体积比对FTO薄膜的透光率和方块电阻的影响。运用X射线衍射仪、扫描电子显微镜、紫外-可见分光光度计和四探针测试仪分别对FTO薄膜进行了表征。结果表明:在喷雾热解液中加入少量的H2O2(0.05mol/L)可明显提高FTO薄膜在可见光区的透光率,而不影响其方块电阻;当喷雾热解液组成为0.8mol/LSnCl4,0.1mol/LNH4F,0.05mol/LH2O2,异丙醇与水的体积比为8:2,衬底温度为500℃,喷涂100次时,所得FTO薄膜在可见光区的平均透光率为84%,方块电阻为15Ω/□,且FTO薄膜平整致密、二氧化锡晶粒均匀。
Transparent conductive thin films of F：SnO 2 （FTO） were deposited on preheated microscopic glass slides using SnCl4·5H2O and NH4 F as sources for tin and fluorine,isopropanol and water as solvents by an intermittent spray pyrolysis method.The effects of concentration of SnCl4,NH4 F,H2O2 and volume ratio of isopropanol to water on the optical and electrical characteristics of FTO thin films were investigated.The FTO thin films were characterized by X-ray diffractometer,scanning electron microscope,ultraviolet-visible spectrometry and four-point-probe setup.The results show that the transmittance of the FTO thin films can be improved due to a moderate concentration of H2O 2 （～0.05 mol/L） in the spraying solution,and the sheet resistance is unchanged.The sheet resistance and the average transmittance of the FTO thin films prepared with the solution with 0.8 mol/L SnCl4,0.1 mol/L NH4 F and 0.05 mol/L of H2O 2,at a volume ratio of isopropanol to water of 8：2 for 100 times at 500 ℃ are 15Ω/□ and 84%,respectively.The FTO thin film has uniform grain size and a compact morphology.
出处
《硅酸盐学报》
EI
CAS
CSCD
北大核心
2010年第1期87-92,共6页
Journal of The Chinese Ceramic Society
关键词
溶液组成
过氧化氢
喷雾热解
氟掺杂二氧化锡薄膜
solution composition
hydrogen peroxide
spray pyrolysis
fluorine-doped tin dioxide thin film
