摘要
采用喷涂法在5mm普通浮法玻璃上制备了纳米级锐钛矿型TiO2薄膜,并进行了不同温度的热处理。采用原子力显微镜、X射线衍射仪和纳米压痕仪分析了薄膜的形貌、结构和微观力学性能。讨论了热处理温度对纳米TiO2薄膜微观力学性能的影响。结果表明:随着热处理温度由20℃升高到500℃,薄膜中TiO2均变为锐钛矿型,平均晶粒尺寸略有增加,薄膜表面平整;随热处理温度从350℃升至500℃,平均粗糙度由12.516nm降低至11.433nm;热处理后纳米压痕硬度和弹性模量均有增加,分别由412.6MPa,14.9GPa增加到908.3MPa,28.4GPa;塑性指数逐渐增大,由0.028增大到0.032;摩擦因数由0.166降低到0.120。
Nanocrystalline titania （TiO 2） thin film with anatase structure was deposited on a float glass with a thickness of 5 mm by spray technology and then heat treated at different temperatures.The morphology,structure and micromechanical properties of TiO2 film were investigated by atomic force microscope,X-ray diffractometer and nanoindentation test.The effect of heat treatment temperature on the micromechanical properties of the film were discussed.The results show that the crystal structures of TiO2 film appear anatase phase when the heat treatment temperature is increased from 20 to 500 ℃.The surface of the TiO2 film is smooth.The average surface roughness decreases from 12.516 nm to 11.433 nm with increasing of the heat treatment temperature from 350 to 500℃.The nanohardness and the elastic modulus both increase,from 412.6 to 908.3MPa,and from 14.9 to 28.4 GPa,respectively.And its plasticity index increase from 0.028 to 0.032.The friction coefficient decreases from 0.166 to 0.120.
出处
《硅酸盐学报》
EI
CAS
CSCD
北大核心
2010年第1期78-82,共5页
Journal of The Chinese Ceramic Society
基金
河北省教育厅指令性计划(2005304)资助项目
关键词
氧化钛薄膜
微观力学性能
摩擦因数
热处理
纳米压痕仪
titania film
micromechanical property
friction coefficient
heat treatment
nanoindentation test
