摘要
针对某些电极结构会破坏石英晶体微天平厚度切变振动模态单一性的问题,该文提出了基于有限元分析优化设计电极结构的方法。该方法直接对原始问题的机电耦合进行三维分析,计算出更加准确的设计参数。基于有限元分析软件ANSYS10.0对石英晶体微天平进行三维建模,验证了建模的正确性,并对不同电极结构尺寸进行仿真计算,对出现的耦合情况进行了分析,通过实验结果对比,提出较佳电极尺寸结构为厚度100 nm,半径3 mm;为解决金电极能陷效应不够理想的问题,提出在晶片上下表面筑平台的设计,有限元计算结果表明此设计能改善电极区的能陷效应,并且较佳平台高度为9.8μm。
An optimal design method of electrode structure based on finite element analysis is proposed to solve the problem that some designs of electrode structures can destroy the singularity of the thickness-shear-mode vibration of quartz crystal microbalance （QCM）. This method calculates true parameters of QCM through three-dimensional analysis of machine-electricity coupling. This paper makes a three-dimensional model for QCM and analyzes directly the coupled phenomenon of the structural and electric fields of QCM with finite element analysis software ANSYSIO. O. Through analyzing the convergence of the resonant frequency of QCM, the correctness of the finite element analysis is proved. The influence of different sizes of electrode on vibration of QCM and an optimal size of electrode is discovered, namely thickness of 100 nm and radius of 3 ram. The design of mesa on crystal plate is provided to solve the problem that the energy trapping is not good enough. This design proves valid based on finite element calculation and an optimal size of the mesa is given, namely height of 9.8 μm.
出处
《南京理工大学学报》
EI
CAS
CSCD
北大核心
2009年第6期796-800,共5页
Journal of Nanjing University of Science and Technology
关键词
石英晶体微天平
厚度切变振动
机电耦合
电极结构
有限元
能陷
quartz crystal microbalance
thickness-shear-mode vibration
machine-electricity coupling
electrode structure
finite element
energy trapping
