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Si/Ge复合纳米结构的制备及表征

Synthesis and characterization of Si/Ge composite nanostructures
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摘要 以Si和GeO2为原料,通过简单直接的热蒸发法在衬底的不同温度区域上得到了章鱼状、羽毛球状、拖把状等不同形貌的Si/Ge/O复合纳米结构。利用扫描电镜(SEM)研究了不同衬底区域纳米结构的形态,结合透射电镜(TEM)的明场像和扫描透射(STEM)模式下能谱的面扫描,系统地研究了不同形貌纳米结构的成分分布,并对生长过程进行了探讨。 By thermal decomposition of Si and GeO2 powder, different morphologies of Ge- and Si-based nanomaterials have been obtained at different temperature regions of the substrate, including the octopus-like, feather-like and besom-like nanostructures. Scanning electron microscopy (SEM) provided morphologies of these different nanostruetures. Combining transmission electron microscopy (TEM) bright-field images and EDS mapping, the elemental distributions and their microstructures of these nanomatefials were investigated. The growing processes of these nanostructures were also discussed.
出处 《电子显微学报》 CAS CSCD 北大核心 2009年第5期478-483,共6页 Journal of Chinese Electron Microscopy Society
基金 北京市优秀人才微纳米结构中的自组织生长研究(No.20061D0501500200)
关键词 热蒸发法 复合纳米结构 衬底温度 thermal evaporation : composite nanostruetures substrate temperature
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