摘要
针对有机无机杂化的电光材料设计了单模加载条形的波导结构,模拟了这种结构中光场的分布,制作了直波导,测得其传输损耗为2.0 dB/cm;采用这种加载条形的波导结构设计了马赫-曾德尔干涉型(MZI)电光调制器,通过对MZI结构互作用区的优化选择,互作用区两波导间距为30μm,长度为15000μm;通过分析共面波导型行波电极的中心电极宽度及中心电极与地电极间距对特性阻抗、重叠积分因子以及半波电压的影响,得出中心电极宽度9μm,中心电极与地电极间距5μm时,器件半波电压最低,为8.4 V。器件制作完成后对其进行测试得出了线性调制曲线,并测得半波电压为9.0 V,与理论值基本符合。
A strip-loading waveguide structure was designed with organic-inorganic hybrid material, and its optical field was simulated. A straight waveguide was fabricated and its transmission loss was tested to be 2.0 dB/cm. A Mach-Zehnder interference （MZI） modulator was designed with this structure. By optimization, the distance between the two waveguides in the interaction region was selected to be 30 μm and the length to be 15000μm. The center electrode width and the gap of coplanar waveguide （CPW） electrode were analyzed to make sure their influence to characteristic impedance, overlap integral factor and half wave voltage. By optimization when the center electrode width was selected to be 9 μm and gap to be 5 μm, the minimum half wave voltage of the modulator is 8.4 V. The device was successfully fabricated and tested. A linear modulating curve was obtained. The half wave voltage in the test was 9.0 V. It agreed with the theoretial value.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2009年第12期3511-3514,共4页
Acta Optica Sinica
基金
国家973计划(2006CB302803)
教育部新世纪优秀人才支持计划(NECT-05-0307)资助课题
关键词
电光调制器
共面波导行波电极
有机无机杂化
加载条形波导
electro-optic modulator
coplanar waveguide（CPW）
organic-inorganic hybrid
strip-loading waveguide
