摘要
针对阴极失效影响因素中的真空度问题,利用扫描电子显微镜以及能谱仪作为研究手段,分析对比了未老炼以及在不同真空条件下老炼的阴极的微观结构以及成分差异,结果表明,真空度降低,阴极中发射物质将与空气中的水汽以及氧反应,导致微观结构发生变化,这对于行波管的封装可靠性提出了较高要求。
As one of the influencing factors on the malfunction of cathode, the vacuum was investigated via SEM and EDS to analyze the microstructure and compositional difference of the cathodes unaged and aged under different conditions. The results revealed that the cathode emissions will react with the vapor and oxygen in air, thus resulting in the change in microstrueture. It means that the reliability of packaging process for TWT(travelling-wave tube) is strictly required.
出处
《真空》
CAS
北大核心
2009年第6期74-76,共3页
Vacuum
关键词
阴极
微观结构
电子显微分析
真空度
cathode
microstructure
electronic microanalysis
vacuum