摘要
介绍了外径为Φ2 mm的超微型压力传感器芯片的设计与结构的封装。改微型传感器已成功用于空气动力学试验及生物医学,科学测试及研究中,尤其在高精度的流体动力学测试中,如风洞测试系统中,要求传感器不仅具有良好的动态特性,而且为了减少对测量流场的影响,提高测量的精度,对传感器的尺寸要求更加小型化。
The design and package of super-miniature pressure sensor whose diameter only 2 mm was introduced. This transducer repeated the change law of fluid field under the condition of not disturbing the state of fluid field in its original position or location based on the limit of installing position. This sensor has successfully used in aerodynamics research, wind tunnel experiment, biomedicine application and much scientific research.
出处
《仪表技术与传感器》
CSCD
北大核心
2009年第B11期180-181,共2页
Instrument Technique and Sensor
关键词
超微型
原位测量
微电子机械技术
Super-miniature
original position measurement
MEMS
