摘要
应用同步辐射技术对ＹＢＣＯ超导薄膜进行光刻，获得０．８μｍ间隔的折线结构，研制成亚微米结构高Ｔｃ超导薄膜红外探测器，敏感元接收红外辐射能量提高约４２％．器件的最好探测率Ｄ＊达到１．８×１０１０ｃｍＨ１／２ＺＷ－１，工作温度约９０Ｋ．
A sub micrometer (0.8μm) meander structure of the high T c superconducting film YBCO infrared detector was fabricated using the synchronous radiation technology. The receivable energy of IR radiation by the sensitive elements was enhanced by about 42%.The detectivity D * for the best detector was 1.8×10 10 cm·H 1/2 Z W 1 at the operational temperature of ￣90K.
出处
《红外与毫米波学报》
SCIE
EI
CAS
CSCD
北大核心
1998年第5期381-385,共5页
Journal of Infrared and Millimeter Waves
关键词
红外探测器
超导器件
YBCO
高TC
亚微米
infrared detector, synchronons radiation, high T c superconducting device.
