摘要
为获得用于表面应力测量的压阻悬臂梁传感器的参数的优化方法,建立了有限元分析模型。通过将模拟结果与压阻理论结合,分析了表面应力作用下的压阻式微型悬臂梁传感器。建立了两层硅悬臂梁结构模型,在顶层硅内施加初始应力模拟表面应力。对仿真结果应力数据进行提取与计算,结合压阻系数,分析了n型硅压阻与p型硅压阻长度、宽度和位置等对微型悬臂梁传感器灵敏度的影响。结果表明:为获得较高灵敏度,n型硅压阻应做长,p型硅压阻应做短并安排在固定端。该文研究结果为悬臂梁生化传感器提供了设计参考。
A finite element model was used to optimize the parameters for a surface-stress sensitive piezoresistive mieroeantilever sensor. The piezoresistive microcantilever sensors were optimized for various doping types by combining simulation and piezoresistive theory. A two-layer silicon cantilever was modeled with initial stresses applied to the top layer to simulate the surface stress. The stresses predicted by the simulations and the piezoresistive coefficients were used to analyze the dependence of the microcantilever sensitivity on the doping types and the length, width, and position of the silicon piezoresistor. The results show that n-type silicon piezoresistors should be long while p-type silicon piezoresistors should be short and placed in the root of the microcantilever to obtain higher sensitivities. Design guidelines are given for piezoresistive microcantilever sensor for surface stress biosensor measurements.
出处
《清华大学学报（自然科学版）》
EI
CAS
CSCD
北大核心
2009年第11期1876-1879,1885,共5页
Journal of Tsinghua University(Science and Technology)
基金
国家自然科学基金资助项目(60871006)
关键词
压阻
悬臂梁传感器
掺杂
表面应力
piezoresistor
microcantilever sensor
doping
surface stress
