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Structure and Properties of Ti-Si-N Coatings Synthesized by Combining Cathode Arc and Middle-frequency Magnetron Sputtering 被引量：2

Structure and Properties of Ti-Si-N Coatings Synthesized by Combining Cathode Arc and Middle-frequency Magnetron Sputtering
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摘要 Ti-Si-N composite coatings were synthesized on a novel combining cathode and middle-frequency magnetron sputtering system, designed on an industrial scale. Ti was produced from the arc target and Si from magnetron target during deposition. The influences of negative bias voltage and Si content on the hardness and microstructure of the coatings were investigated. The composite coatings prepared under optimized conditions were characterized to be nc-TiN/a-Si3N4 structure with grain sizes of TiN ranging from 8-15 nm and exhibited a high hardness of 40 GPa. The enhancement of the hardness is suggested to be caused by the nanograin-amorphous structure effects. Ti-Si-N composite coatings were synthesized on a novel combining cathode and middle-frequency magnetron sputtering system, designed on an industrial scale. Ti was produced from the arc target and Si from magnetron target during deposition. The influences of negative bias voltage and Si content on the hardness and microstructure of the coatings were investigated. The composite coatings prepared under optimized conditions were characterized to be nc-TiN/a-Si3N4 structure with grain sizes of TiN ranging from 8-15 nm and exhibited a high hardness of 40 GPa. The enhancement of the hardness is suggested to be caused by the nanograin-amorphous structure effects.
作者 杨种田 付德君
机构地区 College of Science Accelerator Laboratory and Key Laboratory of Acoustic and Photonic
出处 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2009年第5期702-705,共4页 武汉理工大学学报（材料科学英文版）
基金 Funded by the Natural Science Foundation of China(No.10435060 andNo. 10675095)
关键词 Ti-Si-N composite coatings cathode assisted middle-frequency magnetron sputtering hardness structure Ti-Si-N composite coatings cathode assisted middle-frequency magnetron sputtering hardness structure
分类号 TG174.4 [金属学及工艺—金属表面处理]
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参考文献10

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二级参考文献53

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Journal of Wuhan University of Technology(Materials Science)
2009年 第5期

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