摘要
复杂的生化分析系统往往很难集成于一个微流基片中,而按功能分别集成于两个或多个基片,为此,需要实现质荷在两基片间输运。提出了采用声表面波技术实现数字微流体在压电基片和玻璃基片间输运的新方法,它在128°YX-LiNbO3基片上光刻一个叉指换能器和一个反射栅,经功率放大器放大后频率为27.5 MHz的RF信号加到叉指换能器上,它激发的声表面波驱动其声路径上的数字微流体,使其按声传播方向快速运动,并到达与其相连接且经疏水处理的弧形聚合物表面,数字微流体由于自身重力克服表面张力作用沿弧形聚合物表面滑落到玻璃基片,实现两基片间输运。实验结果表明弧形聚合物曲率半径和微流体体积的大小影响其在两基片间输运。同时,提出了较小体积的微流体采用不相溶的油作为辅助微流体实现目标数字微流体在两基片间输运。
As unit operations of a complicated biochemical analysis system cannot be integrated into a sub- strate,they are usually integrated into two or more substrates. It is necessary to transport micro fluids between two substrates. A new method to transport digital micro fluids between a glass substrate and a piezoelectric substrate is proposed. An interdigital transducer and a reflector are fabricated on a 128° YX-LiNbO3 substrate. When an amplified RF signal with 27.5 MHz center frequency is added on the interdigital trans- ducer, surface acoustic wave excited by the interdigital transducer will propel a digital micro fluid along its propagation direction. After the digital micro fluid arrives at an arc-shaped polymer, which connects with the piezo-eleetric substrate,it will slide off the polymer and be transported onto the glass substrate. Experi ment results show that the transportation of micro fluids is dependent on curvature radius of the arc-shaped polymer and micro-fluidic volume. In the meantime, a method to transport a digital micro fluid with small volume, which cannot slide off the polymer, is also proposed with help of un-mixing oil.
出处
《传感技术学报》
CAS
CSCD
北大核心
2009年第10期1382-1386,共5页
Chinese Journal of Sensors and Actuators
基金
浙江省自然科学基金资助项目(Y1080118)
宁波市自然基金资助项目(2007A610005)
宁波大学王宽诚幸福基金资助
关键词
声表面波
数字微流体的输运
弧形聚合物
叉指换能器
Surface acoustic wave
Transportation of digital micro fluids
Arc-shaped polymer
Interdigital transducer
