摘要
对三种典型的铝硅双金属驱动膜片结构进行了有限元分析。结果表明，铝硅双金属驱动膜片的结构参数与驱动膜片的弯曲变形方向、中心最大挠度和有效形变体积具有紧密的联系。通过不同的结构设计可以控制驱动膜片结构的弯曲变形方向。另外，通过结构参数优化，可使驱动膜片的中心最大挠度和有效形变体积达到最大值，驱动膜片的性能得到显著提高。
? Three typical AlSi bimetal driving membrane structures are analyzed in this paper. The deflection of the three structures is calculated by twodimensional finite element models using the finite element method (FEM) software SAP91. The results show that the deflection direction, maximum center deflection of the membrane and the effective change of the volume all rely on the structure parameters. Different deflection direction can be obtained through the different structure design. If the structure parameters are optimized, the characteristics of the membrane can be improved dramatically.
出处
《功能材料与器件学报》
CAS
CSCD
1998年第2期95-100,共6页
Journal of Functional Materials and Devices
基金
国家攀登计划B支持
关键词
微电子机械系统
微机械
微执行器
Micropump, Bimetal driving membrane, Structure parameter optimization
