摘要
本文利用四极质谱仪对真空镀铝模拟过程中玻璃在真空中受热出气的成分及特点进行了分析,认为玻璃出水乃是铝/玻璃界面富氧区氧元素的主要来源。通过对玻璃工作温度的分析,提出了予热玻璃的程序。用这种办法可以有效地减少出气的影响,并提高铝膜的附着力。
The composition of glass outgassing by heating at vacuum hare been characterized using Quadrupole Mass-Spectro-Meter, It was considered that the released water of the outgassing from the glass during the deposition procesr is the main oxygen source of the rich oxygen region found at the A1/glass interface. Through analysis of the glass working temperature a preheating program of glass is developed and tested results show that this program could efficiently eliminate the outgassing affection and increase the adhesion of A1 film to the substrate.
