摘要
采用锁相环和余弦近似补偿的激光扫描测量直径,不用F-θ透镜而达到测量精度。
Make use of fase locked loop and cosine approximate compensate method for laser scanning measuring diameter without F-θ lens,reach a high measure precision.
出处
《应用激光》
CSCD
北大核心
1998年第4期177-178,186,共3页
Applied Laser
关键词
锁相环
激光扫描
测径
F-θ透镜
fase locked loop, laser scanning, F-θ lens, measuring diameter