摘要
在论述光学三角测量原理的基础上，重点讨论了可适用的激光非接触探头的结构设计和制做。研制了分辨率小于2μm的激光非接触探头，给出了实测结果。
The basic working principle of optical triangulation is introduced. An emphasis is placed on the manufacturing technology of laser non-contact probe. A laser probe with less than 2 um resolution has been made and the measured result is given.
出处
《激光与光电子学进展》
CSCD
1998年第7期18-21,共4页
Laser & Optoelectronics Progress
基金
"八五"攻关课题
关键词
激光头
非接触测量
探头
设计
半导体激光器
laser probe, non-contacting measurements, design and manufacturing technology of probe.
