摘要
利用变角XPS方法研究不同磁场条件下碳氟等离子体对PET表面的改性，并探讨了磁场对碳氟等离子体聚合的影响．实验结果表明，随磁场强度的增加，碳氟混合气体等离子体发生从聚合区域向刻蚀区域过渡的转折点向CF4含量低的方向移动；碳氟混合气体等离子体的不同作用区域的特征得到增强．
PET surfaces were modified by CF4 and CH4/CF4 plasmas in the presence of an external magnetic field. The angle-dependent XPS technique was employed to study the changes of the surface properties of the modified PET. It was found that homogeneous polymerized films by CH4/CF4 mixture plasma can be obtained; however, the pure CF4 plasma can not. Because of the enhancement effects of the magnetic field, the transformation from polymerization to etching occurred, and the turning point shifted to the left. The characteristics, relative to the different reaction mechanism of the different zone, of the different zone of CH4/CF4 molar ratio were enhanced.
出处
《吉林大学自然科学学报》
CSCD
1998年第3期64-67,共4页
Acta Scientiarum Naturalium Universitatis Jilinensis
基金
国家自然科学基金
高等学校博士点基金
关键词
碳氟等离子体
变角XPS
磁场
聚合
PET
fluorocarbon plasma, angle-dependent XPS, magnetic field, polymerization, etching, deposition rate
