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脉冲激光沉积YBa_2Cu_3O_(7-δ)薄膜表面形态研究

Study on YBa_2Cu_3O_(7-δ)Thin Films Prepared by Pulsed Laser Deposition
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摘要 用脉冲激光沉积法,在SrTiO3基板上获得YBa2Cu3O7-δ超导薄膜.对其超导性能、晶体结构、原子尺度的平面形态和均匀性等进行研究.观察到YBa2Cu3O7-δ超导薄膜的原子图像. High qualit YBa2Cu3O7-δ,superconductor thin films were obtained on SrTiO3 {100} by pulsed laser deposition. Both of conventional electrical properties and atomically smooth surface morphology and homogeneities in crystal structure were discussed. Atomic image of the films surface was abserved.
出处 《吉林大学自然科学学报》 CSCD 1998年第3期55-57,共3页 Acta Scientiarum Naturalium Universitatis Jilinensis
关键词 超导薄膜 脉冲激光沉积 表面形态 YBa_2Cu_3O_(7-δ) thin films,pulsed laser deposition,surface prepared
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