期刊文献+
任意字段
题名或关键词
题名
关键词
文摘
作者
第一作者
机构
刊名
分类号
参考文献
作者简介
基金资助
栏目信息

靶功率和基体偏压对BCN薄膜成分及结构的影响 被引量：1

Effect of Target Power and Bias on the Composition and Microstructure of BCN Films
在线阅读 下载PDF
导出
摘要 利用直流磁控溅射技术制备了三元硼碳氮(BCN)薄膜,通过改变靶功率(70 W和210 W)和基体偏压(-50V～-400 V)得到不同成分和组织结构的薄膜。采用X射线光电子能谱仪和傅立叶红外光谱仪分析了薄膜的成分和结构。结果表明:靶功率增加使得薄膜成分发生改变,而基体偏压改变对薄膜中各元素的原子百分含量几乎没有影响;基体偏压的增加会引起高能粒子对基体的轰击作用增强,有利于薄膜中B-N键的形成,而且轰击能量越高越有利于sp^3杂化的B-N键形成。 BCN films were deposited by DC magnetron sputtering, and the films with different contents and structures were prepared by changing target power and bias in this paper. The composition and bonding structure of BCN films were studied by X-ray photoelectron spectroscopy （XPS） and Fourier transform infrared spectroscopy （FTIR）. The results indicate that the element contents of BCN films change with the increasing of the target power, and the change of bias makes no difference to element contents of films. The effect of bombardment by energetic particle is enhanced, and the formation of B-N bonding is preferential with the increasing of the bias. The increasing of bombardment energy favor the formation of sp3 B-N bonding.
作者 徐淑艳 马欣新 唐光泽 孙明仁
机构地区 东北林业大学森林持续经营与环境微生物工程黑龙江省重点实验室 哈尔滨工业大学材料科学与工程学院
出处 《中国表面工程》 EI CAS CSCD 北大核心 2009年第4期26-30,共5页 China Surface Engineering
关键词 BCN薄膜 靶功率 基体偏压 组织结构 BCN films target power bias microstructure
分类号 O484.1 [理学—固体物理]
  • 相关文献

参考文献9

  • 1Cohen M L. Calculation of bulk module of diamond and zinc-blonde solids [J]. Physical Review B, 1985, 32: 7988-7991.
  • 2Linss V, Hermann I, Schwarzer N, et al. Mechanical properties of thin films in the ternary triangle B-C-N [J]. Surf. Coat. Technol., 2003, 163-164: 220-226.
  • 3Caretti I, Jimenez I, Gago R, et al. Tribological properties of ternary BCN films with controlled composition and bonding structure [J]. Diamond and Related Materials, 2004, 13(4-8): 1532-1537.
  • 4Tadao Yuki, Shuichi Umeda, Takashi Sugino. Electrical and optical characteristics of boron carbon nitride films synthesized by plasma-assisted chemical vapor deposition [J]. Diamond and Related Materials, 2004, 13: 1130-1134.
  • 5Md. Abdul Mannan, Masamitsu Nagano, Tetsuya Kida, et al. Characterization of BCN films synthesized by radiofrequency plasma enhanced chemical vapor deposition [J]. Journal of Physics and Chemistry of Solids, 2009, 70: 20-25.
  • 6Essafti A, Ech-chamikh E, Fierro J L G.. Structural and chemical analysis of amorphous B-N-C thin films deposited by RF sputtering [J]. Diamond & Related Materials, 2005, 14: 1663-1668.
  • 7Itoh S. Electronic Properties of BCN films: theory and experiment [J]. Diamond Films and Technology, 1997, 7(3): 195-209.
  • 8Grill A. Electrical and optical properties of diamond-like carbon [J]. Thin Solid Films, 1999, 355-356: 189-193.
  • 9Panayiotatos Y, Logothetidis S, Handrea M, et al. Homogeneous and amorphous sputtered sp-bonded BN films at RT: a stress, spectroscopic ellipsometry and XPS study [J]. Diamond and Related Materials, 2003, 12: 1151-1156.

同被引文献17

  • 1李幼真,刘雄飞,肖剑荣,张云芳.a-C:F薄膜的工艺及热稳定性研究[J].真空电子技术,2004,17(3):23-26. 被引量：4
  • 2Aisenberg S, Chabot R. Ion-beam deposition of thin films of diamondlike carbon[J]. Journal of Applied physics, 1971, 42(7) : 2953-2958.
  • 3Robertson J. Diamond-like amorphous carbon [J]. Materials Science and Engineering: R, 2002, 37(4/5/6): 129-281.
  • 4Donnet C, Erdemir A. Tribology of diamond-like carbon films: [undamentals and applications[M]. New York: Springer Verlag, 2008: 311-319.
  • 5Spear K E, Dismukes J P. Synthetic diamond: emerging CVD science and technology [M]. Wiley- Interscience, 1994.- 91-103.
  • 6Yu G Q, Tay B K, Sun Z. Fluorinated amorphous dia- mond- like carbon films deposited by plasma- enhanced chemical vapor deposition [J]. Surface and Coatings Tech- nology, 2005, 191(2/3): 236-241.
  • 7Donnet C, Fontaine J, Grill A, et al. Wear-resistant fluorinated diamondlike carbon films [J].Surface and Coatings Technology, 1997, 94-95: 531-536.
  • 8Hasebc T, Matsuoka Y, Kodama H, et al. Lubrication per- formance of diamond-like carbon and fluorinated diamond-like carbon coatings for intravascular guidewires [J]. Diamond and Related Materials, 2006, 15(1): 129-132.
  • 9Hakovirta M, Verda R, He X, et al. Heat resistance of fluorinated diamond-like carbon films [J]. Diamond and Related Materials, 2001, 10(8): 1486-1490.
  • 10Liu Y H, Wang X K, Luo J B, et al. Fabrication and tri- bological properties of super- hydrophobic surfaces based on porous silicon [J]. Applied Surface Science, 2009, 255 (23) : 9430-9438.

引证文献1

二级引证文献2

中国表面工程
2009年 第4期

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部