摘要
为了提高共面介质阻挡放电(DBD)的真空紫外线(VUV)辐射效率,采用流体模型研究了Ne/Xe混合气体的压强及Xe含量对DBD真空紫外辐射特性的影响。数值模拟结果表明:在一定的放电电压下,增加Xe的含量或气体压强,147nm的真空紫外辐射效率明显下降,但173nm真空紫外辐射效率得到了较大的提高,即总的VUV辐射效率有较大的提高;气压过高会降低VUV辐射总量(发光亮度)。
In order to improve the efficiency of dielectric barrier discharge（DBD）,the evolution of discharge in Ne/Xe mixture is investigated by fluid model.The characteristics of vacuum ultraviolet（VUV） ray with various pressure and Xe fractions are obtained.The results show that as the pressure and Xe fractions increasing,147 nm VUV radiation efficiency decreases,but 173 nm VUV efficiency increases.And the total VUV efficiency increases.The results also show that the total VUV radiation and luminance of DBD will de...
出处
《光学技术》
CAS
CSCD
北大核心
2009年第4期604-607,共4页
Optical Technique
关键词
介质阻挡放电
真空紫外辐射
数值模拟
dielectric barrier discharge
VUV radiation
numerical simulation
