摘要
研究了硫化温度及硫化时间对合成FeS2薄膜材料的影响规律。结果表明,在400—600℃对磁控溅射制备的纯Fe膜硫化10—30h,可以得到接近等轴状且具有一定择优取向的多晶FeS2薄膜。在400℃硫化10h条件下,FeS2即能够以较快速率生成,随硫化温度升高或硫化时间延长,FeS2生成速率便不再明显上升。
The polycrystalline FeS 2 thin films are prepared by thermal sulfidation of iron layers sputtered on glass substrates.In this paper,the effect of the sulfidation process (sulfidation temperature and annealing time)on the formation of FeS 2 thin films has been investigated.The test results show that the equiaxed FeS 2 grains in the preferred orientation can be synthesized when the sulfidation temperature is in 400—600℃ and the annealing time in 10—30h.There is a quicker growth of FeS 2 crystal if the iron layers is sulfurated for 10 h at 400℃. Above 400℃ and 10 h the rate to form FeS 2 crystal increases insignificantly with the increase of sulfidation temperature or annealing time.
出处
《太阳能学报》
EI
CAS
CSCD
北大核心
1998年第3期322-326,共5页
Acta Energiae Solaris Sinica