摘要
利用直流磁控溅射法，在Ｏ２＋Ｈ２的气氛下制备了ＮｉＯｘＨｙ薄膜，研究了不同氢气含量对薄膜的初始沉积态、漂白态和着色态透光性能的影响，含氢量为８０％时，薄膜的初始沉积态的平均可见光透射比最高。含氢量为６０％时，薄膜的电致变色能力最佳。用获得的ＮｉＯｘＨｙ薄膜制备的反射型全固态电致变色器件的控光范围可达７７％。对ＮｉＯｘＨｙ薄膜三种状态的红外吸收光谱分析表明，ＮｉＯｘＨｙ薄膜的变色机理可用：Ｎｉ（ＯＨ）２（漂白态）＝ＮｉＯＯＨ（着色态）＋Ｈ＋＋ｅ－表示。
NiO xH y thin films have been prepared by dc magnetic sputtering with O 2+H 2.As deposited state,bleached state and colored state of the NiO xH y thin films with different hydrogen concentration in the sputtering atmosphere have been studied.The as deposited state with 80% hydrogen concentration shows the best transmittance.The films with 60% hydrogen concentration show the best electrochromic property.Infrared transmittance spectroscopy for the films indicated that the main feature of the electrochromism of nickel oxide films may be captured in the schematic reaction:Ni(OH) 2=NiOOH+H ++e -1 .
出处
《太阳能学报》
EI
CAS
CSCD
北大核心
1998年第3期243-247,共5页
Acta Energiae Solaris Sinica
