摘要
本文研究了AgOx薄膜的光学性能、分解过程和记录特性．研究表明，在氩气分压为0.67Pa和氧气分压为2.0Pa的条件下，反应溅射制备的AgOx薄膜是非晶态的，在400℃热处理时，完全分解为Ag;本文成功地对AgOx薄膜进行了静态写入实验，AgOx有望成为一种新的CD－R存储介质．
The optical properties, decomposition process and recording properties of AgOx films wereinvestigated. The results showed that AgOx films prepared by using dc reactive sputtering underthe condition of Ar pressure of 0.67Pa ajnd O2 pressure of 2.OPa were amorphous and completelydecomposed into Ag at 400℃. The static writing of AgOx films was successfully accomplished.AgOx may be promising to become a new kind of CD-R recording media.
出处
《无机材料学报》
SCIE
EI
CAS
CSCD
北大核心
1998年第3期440-444,共5页
Journal of Inorganic Materials
关键词
光记录
反应溅射
AgOx
薄膜
存储介质
optic storage, CD-R, reactive sputtering, film, decomposition
