摘要
微悬臂是原子力显微镜中最重要的部件之一。用压电微悬臂代替常用的Ｓｉ、ＳｉＯ２或Ｓｉ３Ｎ４微悬臂后的原子力显微镜有一些独特的优点。由于压电微悬臂中的压电薄膜具有压电效应，因此它既可致动微悬臂，又可探测微悬臂的位移量，使得原子力显微镜的结构简单、响应速度快、扫描速度加快。文中简要介绍了压电微悬臂的制作过程，分析了压电微悬臂在原子力显微镜中的各种应用及相应的原子力显微镜的工作原理和有关结果，并与普通原子力显微镜进行了比较。
Microcantilever is one of the most important parts in atom force microscope(AFM).After using piezoelectric microcantilever instead of conventional Si, SiO_2 or Si_3N_4 microcantilever, the AFM has some unique advantages. By using the piezoelectric effect of piezoelectric thin film in piezoelectric microcantilever, the microcantilever can be actuated and the deflection of the microcantilever can be detected. This leads to simple structure, fast response, and high scanning speed of AFM. In this paper, the fabricating process of piezoelectric microcantilever was briefly introduced, various applications of piezoelectric microcantilever to AFM, the working principle of the AFM and related results were analyzed, some comparisons between AFM using piezoelectric microcantilever and conventional AFM were also given.
出处
《压电与声光》
CSCD
北大核心
1998年第4期245-259,共15页
Piezoelectrics & Acoustooptics
基金
国家自然科学基金
关键词
压电薄膜
压电微悬臂
原子力显微镜
微传感器
piezoelectric thin film, piezoelectric multicantilever, atom force microscope, microsensor, microactuator
