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微型剪应力传感器的热特性分析 被引量：2

Thermal Analysis of a Micro Shear-Stress Sensor
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摘要 研究不同结构、不同热敏元件温度和不同工作介质等情况下剪应力传感器的性能差异.通过实验和数值模拟相结合的方法对剪应力传感器进行了热特性分析.数值模拟结果发现:采用热敏元件下部埋置真空空腔的结构,隔热效果最佳;选择相对较高的热敏元件温度和较高热物性系数的工作气体有助于获得较高的灵敏度.该结果对优化设计微型剪应力传感器具有通用的指导意义. Thermal analysis based on numerical simulation is carried out to study the performance of sensors with various micro-structures, thermal element temperature, and gas working media. The simulation results showed that the heat loss on the substrate is the smallest for the sensor with vacuum cavity. The numerical results also indicate that high thermal element temperature and high gas conduction coefficient are beneficial to the sensitivity.
作者 丁英涛 逯海波 仲顺安 谢君堂
机构地区 北京理工大学信息科学技术学院电子工程系
出处 《北京理工大学学报》 EI CAS CSCD 北大核心 2009年第5期427-430,共4页 Transactions of Beijing Institute of Technology
基金 国家自然科学基金资助项目(60843005) 北京理工大学基础研究基金资助项目(20070142018)
关键词 微电子机械系统 剪应力传感器 灵敏度 热敏元件 micro-electro-mechanical-systems （MEMS） shear-stress sensor sensitivity thermal element
分类号 TN40 [电子电信—微电子学与固体电子学]
  • 相关文献

参考文献11

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共引文献2

同被引文献16

  • 1许正,李万平.MEMS壁剪应力传感器热效应的数值模拟[J].传感器与微系统,2006,25(12):32-34. 被引量：1
  • 2丁英涛,仲顺安,谢君堂.微管道内剪应力传感器的研制与优化[J].北京理工大学学报,2007,27(3):251-254. 被引量：3
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引证文献2

二级引证文献6

北京理工大学学报
2009年 第5期

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