摘要
为了解决双纵模双频激光干涉仪原有信号处理电路两路信号易直流漂移、不正交对干涉仪系统测量精度和速度的限制及调整光路观察信号不方便等问题,利用AD8302的良好高频处理特性,设计了一种新的基于AD8302的双纵模双频激光干涉仪信号处理系统,给出了方案的总体框图和信号处理流程图,详细地分析了其工作原理以及提高相位测量精度方法。由于器件相位测量的高分辨率,该系统也可用于高分辨率双纵模双频激光轮廓仪的信号处理。
In order to solve the problems that the measurement accuracy and speed of the interferometer system are limited due to two signals are easy to drift DC and non-orthogonal and observing signal is inconvenient when the optical path is being adjusted in the original signal processing circuit of the dual-frequency laser profder with two longitudinal modes, using the excellent capability of dealing with the high-frequency signal of AD8302, a new signal processing system for dual-frequency laser interferometers with two longitudinal modes is designed. The overall system diagram and the signal processing program of the design are presented, and the working principle and methods to improve the phase measurement precision are analyzed in detail. As the resolution in phase measurement of this system is high enough, it also can be applied to the signal processing system of the high- resolution dual-frequency laser prof＇der with two longitudinal modes.
出处
《中国测试》
CAS
2009年第3期52-55,共4页
China Measurement & Test
基金
国家自然科学基金项目(50275101)
关键词
AD8302
激光干涉仪
相位测量
高频信号
信号处理
AD8302
Laser interferometer
Phase measurement
High-frequency signal
Signal processing
