摘要
为了对柔软易损坏材料以及具有大台阶特征的表面实现高精度非破坏性测量,研制了一种采用PVDF薄膜和压电驱动器(PZT-actuator)结合钨探针构成的新型SPM测头。介绍了测头的构成和工作原理,并通过一系列相关实验,确定了测头的相关参数和性能(如薄膜的尺寸参数、所构成振动梁的品质因素及弹性常数等),初步证实了该测头可以满足上述测量要求。
In order to measure the topography of the soft, easily-destroyed samples as well as that with high step micro-features accurately and nondestructively, a new style of SPM stylus fabricated by PVDF film and PZT-actuators has been developed. The mechanical structure and operating principle of the stylus are introduced firstly, and then, according to a series of experi- ments, the physical dimensions of the PVDF fihn and performance of the stylus, such as the Q - factor, spring constant k, are confirmed. These results preliminary proved that this style of stylus can basically meet the challenges mentioned above.
出处
《工具技术》
2009年第5期95-98,共4页
Tool Engineering
基金
国家重点实验室开放基金项目(项目编号:PIL0513)
