摘要
以甲烷为反应气体,氩气为辅助气体,通过大气压介质阻挡放电等离子枪,制备纳米类金刚石。在此过程中,利用发射光谱对甲烷等离子体中产生的活性粒子进行光学发射特征的原位诊断。通过对检测到的发射光谱谱图的研究,证实了CH、C2、Hα等自由基粒子的存在,研究了不同的实验参数,如放电电压和气体流量对CH活性粒子发射强度的影响,并由此分析了甲烷可能的离解过程,同时计算了不同条件下的电子温度。结果表明,随着输入电压及CH4流量的增加,CH自由基的发射强度随之增加。根据掺入甲烷的Ar原子谱线计算出电子温度,其范围在0.4eV～0.6eV之间,而且随着输入电压及气体流量的增加而降低。
The reactive radicals in the methane plasma, generated by an atmospheric pressure, dielectric barrier discharge （DBD） plasma jet with argon as the buffer gas,were characterized with optical emission spectroscopy （OES） to better understand the growth of diamond-like carbon （DLC） nano-films. Various radicals, including CH, G2 and H2, were in＇situ observed in the DLC film deposition. The influence of the film growth conditions, such as the input voltage and gas flow rate, on the emission intensity of the CH radicals was studied to understand the decomposition mechanism of methane molecules. The results show that as the input voltage and the methane flow rate increase, the emission intensity of CH radicals increases. In addition, the electron temperature was found to be 0.4eV - 0.6eV by means of the argon spectra; and it decreases with an increase of both the input voltage and methane flow rate.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2009年第3期268-272,共5页
Chinese Journal of Vacuum Science and Technology
基金
国家自然科学基金(No.10775017)
PHR(IHLB)资助
关键词
发射光谱
甲烷
大气压等离子枪
电子温度
OES, CH4, Atmospheric pressure plasma jet, Electron temperature
