摘要
设计了波长为850 nm的4×4阵列光互连模块,利用ZEMAX软件对使用双柱面透镜和梯度折射率透镜的系统光路进行了模拟计算,通过比较,设计最终采用了对准容差更大的850nm梯度折射率透镜。利用1×4的梯度折射率透镜阵列将1×4的850 nm垂直腔表面发射激光器(VCSEL)阵列和2×4的Si探测器阵列连接起来,经对准后组装成了1×4的线列光互连模块,模块的信号电流/串扰电流比大于0.53×105。
An 850 nm 4 × 4 array module for optical interconnections was designed. By applying ZEMAX software, the light trace of the module was simulated. A comparation between the bicylindrical lens and the GRIN lens made the GRIN lens to be selected for its bigger alignment tolerance. Then a 1 ×4 850 nm VCSEL(Vertical Cavity Surface Emitting Laser) array and a 2 ×4 Si PIN PD array were joined together with a 1 × 4 GRIN lens array, after the alignment work, a 1 × 4 array module for optical interconnections was fabricated successfully, with the signal-to-crosstalk ratio greater than 0.53 × 10^5.
出处
《半导体光电》
CAS
CSCD
北大核心
2009年第2期200-202,219,共4页
Semiconductor Optoelectronics