摘要
反应离化团束沉积技术是在离化团束沉积技术基础上加入了反应材料。本文讨论了簇团的产生、离化、加速，成膜的机制，及其在薄膜制备中的应用。
Reactive ionized cluster beam deposition is based on ionized cluster beam deposition with reactive materials. The formation、ionizing、accelerating of the clusters and the formation mechanism of the films are discussed. The application of this technology is also mentioned.
关键词
R-ICBD
离化团束沉积
薄膜
制备
Reactive Ionized Cluster Beam Deposition Ionized Clusterbeam Deposition Films
