摘要
对微机电系统(MEMS)中几种常用构件材料的表面能及其主要影响因素进行了探讨,并与材料表面的纳观黏附性能进行了分析比较.用Owens二液法计算出硅基材料的表面能在60—75mJ/m2之间,它们之间总表面能的差异主要归结为表面能极性分量的差异,表面粗糙度的存在使表观表面能有所偏高.施加自组装分子膜后的表面能大为降低,粗糙度的存在可以使其表面能进一步减小.纳观黏附力和表面能之间有一定的对应关系.另外,在研究中发现表面粗糙度对纳观黏附行为的影响较小.
This paper compares and discusses the surface energy and its related factors between different kinds of micro-component materials commonly used in MEMS,and analyzes the nano-adhesion behaviors of their surfaces.The results by the Owens method show that the surface energies of the silicon-based materials are between 60—75 mJ/m2 and the presence of surface roughness would result in higher nominal surface energy when the contact angle is less than 90°.In contrast,the nominal surface energy would go much lower when the surface is rough with the coverage of a SAM film.There is a certain dependence of nano-adhesion on surface energy,and the effect of surface roughness on nano-adhesion can be neglected in the present study.
出处
《物理学报》
SCIE
EI
CAS
CSCD
北大核心
2009年第4期2518-2522,共5页
Acta Physica Sinica
基金
浙江省自然科学基金(批准号:Y107746)资助的课题~~
