摘要
采用不同粒度的金刚石粉研磨硬质合金基体表面,然后采用酸碱两步法处理基体,清洗后利用热丝化学气相沉积法(HFCVD)沉积金刚石涂层。扫描电镜观察表面金刚石形貌,洛氏硬度压痕法评价涂层结合情况。实验结果表明适当的表面粗糙度可以有效地提高膜基结合水平。
The surface of the cemented carbide substrate were ground with different grade diamond powder and etched in two-step method, and then diamond films with 10-30 μm in thickness were deposited by using HFCVD. The micrographs with different processes were observed by SEM. Adhesion strength of diamond films on cemented carbide were evaluated by Rockwell indentation tests. The result shows that the adhesion strength could be improved with suitable surface roughness.
出处
《超硬材料工程》
CAS
2009年第2期8-11,15,共5页
Superhard Material Engineering
关键词
表面粗糙度
洛氏硬度压痕法
金刚石涂层
结合力
surface roughness
Rockwell indentation tests
diamond coating
adhesion strength
