摘要
通过分析梁式硅微机械陀螺的原理 ,确定了其结构参数。介绍制造工艺流程 ,完成了器件的制作 ,并测试出其工作谐振频率。
The structrual apparatuees of the cantilever beam type Si micromechanical gyroscope are determined through analyzing it's principle.The fabrication processing of this type gyroscope is introduced. The device is finished and it's resonant frequency is measured.
出处
《遥测遥控》
2001年第1期43-47,共5页
Journal of Telemetry,Tracking and Command
关键词
陀螺
哥氏力
微机械
微机电系统
Gyroscope Coriolis'force Micromechanics MEMS
