摘要
硅发光对于在单一硅片上实现光电集成是至关重要的.本文介绍了目前已有的使硅发光的方法:掺深能级杂质,掺稀土离子,多孔硅,纳米硅以及Si/SiO2超晶格,讨论了两种可能的发光机制:量子限制效应和表面复合效应.最后介绍了两个硅发光器件。
Abstract Silicon luminescence is most important for opto electronic devices integrated on a single silicon substrate. This paper introduces some recent methods making silicon luminescent: doping of deep level impurities, doping of rare earth ions, porous silicon, nanocrystalline silicon, and Si/SiO 2 superlattice. Two possible luminescence mechanisms are discussed: quantum confinement effect and surface combination effect. Finally we introduce two silicon luminescence devices, showing that their prospect is bright.