摘要
纳米晶软磁合金（Ｆｅ７３．５Ｃｕ１Ｎｂ３Ｓｉ１３．５Ｂ９）的典型结构为两相：即大小为１５ｎｍ的ＦｅＳｉ小晶粒相弥散分布于剩余非晶基体相中。在离子减薄制备的电镜样品中，孔的边缘往往有一些无颗粒区。我们用ＥＤＳ研究了其化学成分，发现这些无颗粒区的成分不同于理论估计的非晶基体相的化学成分，也不同于材料原来的平均成分。其电子选区衍射（ＳＡＤ）花样既和两相区的衍射花样不同，表现为ｄ＝０．２７ｎｍ附近的一个非晶衍射环，也和制备态的非晶衍射环不同，说明这些非晶区可能是在样品的离子减薄过程中二次非晶化引起的。
? The typical microstructure of nanocrystalline soft magnetic ribbon materials, for example Fe 73 5 Cu 1Mo 3Si 13 5 B 9, consists of two phases:very small bcc FeSi grain phase embedded in the residual amorphous matrix phase. Some small grain free regions (GFR) near the hole in the transmission electron microscopic specimen of this material prepared by ion milling was observed. Selected area diffraction (SAD) pattern from the grain free region was found to be different from both that taken from the two phase region (TPR) in the nanocrystalline specimen and that from the as cast specimen, showing a halo at the position roughly corresponding to d =0.27nm. The composition of the grain free region was determined by X ray energy dispersive (EDS) technique using quantitative software for thin films and was also found to be different from both the composition of the residual amorphous phase and that of the as cast state. Therefore these grain free regions may be the result of the Ar + sputtering during the ion milling thinning process.
出处
《电子显微学报》
CAS
CSCD
1998年第3期237-242,共6页
Journal of Chinese Electron Microscopy Society
关键词
样品制备
离子减薄
纳米晶软磁合金
化学成分
specimen preparation\ ion milling\ nanocrystalline soft magnetic alloy\ chemical composition
