摘要
本文提出用准光腔测量薄膜材料复介电系数的新技术．根据双层介质的测量原理，把多层薄膜叠加起来并压上一块介电特性已知的平板样品以消除空气间隙及平整卷曲材料．推导了双层介质的正确理论计算公式，更正了以往文献中的失误之处．采用简易的变腔长法，对几种薄膜材料进行了测量，取得了满意的结果．
Based on doubol-layer dielectric measurements, a new techniqUe for measuring the complex permittivity of thin-film materials by means of an open resonator, in which the multilayer films are folded together and pressed with a heavy flat sample whose dielectric property is wen known to eliminate air gaps and flatten warped materials, is presented in this paper. The theoretical formulae are derived and the literature errors corrected. Applying the simply equipped length-varying method, measurements on several thin films were carried out and satisfactory results were achieved.
出处
《电子学报》
EI
CAS
CSCD
北大核心
1998年第5期30-33,59,共5页
Acta Electronica Sinica
关键词
准光腔
介质测量
多层薄膜材料
变腔长法
Open resonator, Dielectric measurement, Multilayer thin-film materials, Length-varying method
