摘要
报道了基于二维凹面光栅的单片集成波长解复用器件，器件刻蚀在ＩｎＧａＡｓＰ／ＩｎＰ平板波导上，通过凹面光栅的色散作用实现不同波长光的分离，光的输入输出耦合由波导阵列来完成，器件的工作波长在１．５μｍ附近，通道间隔约４．３ｎｍ，本文给出了器件的设计方法、制作工艺和初步测试结果。
An InGaAsP/InP monolithic wavelength demultiplexer based on two-dimensional concave grating is reported.The concave grating is etched on the edge of a planar waveguide and the input/output couplings of the light are performed by rib waveguides.The operation wavelength of the multiplexer are around 1.5 μm with channel spacing of 4.3 nm.The design consideration,fabrication technology and preliminary experimental results are given.
出处
《半导体光电》
EI
CAS
CSCD
北大核心
1998年第1期44-47,共4页
Semiconductor Optoelectronics
基金
国家"863"资助
关键词
集成光学器件
凹面光栅
罗兰圆
波分复用
OEIC Devics,Concave Grating,Rowland Circle,Wavelength Division Multiplexing
