摘要
采用真空蒸镀和磁控溅射等工艺,利用纯度为99.995%的有机材料酞菁铜(简称CuPc),试制了Cu/CuPc/Al/CuPc/Cu5层结构的有机静电感应三极管.在室温下测试栅极Al/CuPc的肖特基势垒特性,发现它具有良好的整流特性;通过对该三极管特性进行测试研究,结果表明,该三极管驱动电压低,呈不饱和I-V特性,且其工作特性依赖于铝栅极的电压.
Using the organic material Copper Phthalocyanine with purity of 99.995%, the organic static induction transistor whose structure is Cu/CuPc/A1/CuPc/Cu, was manufactured with the technology technologies of vacuum evaporation and magnetron sputtering. At room temperature, the tests of the Schottky barrier properties on both sides of the A1/CuPc gate show that the Schottky has good rectification. This paper also presents the tests for the characteristics of the transistor. The result shows that this type of transistor can drive in low voltage and have unsat-urated I-V characteristics, which depend on the voltage of A1 gate.
出处
《应用科技》
CAS
2009年第1期30-33,共4页
Applied Science and Technology
基金
黑龙江省科技攻关基金资助项目(GC04A107)
关键词
有机三极管
真空蒸发
磁控溅射
酞菁铜
organic static induction transistor
vacuum evaporation
magnetron sputtering
CuPc
