摘要
利用环形子孔径拼接法,无需零位补偿就能够实现对大口径非球面的测量。但是用干涉仪直接测得的各子孔径的相位数据中包含非共光路误差,同时必须把各子孔径的CCD像素坐标统一归化到镜面上,才能够实现全口径的拼接。提出了一种用干涉仪MetroPro软件中的Fiducial功能模块标定坐标投影畸变的新方法,同时利用Zemax软件模拟非共光路误差,并利用编制的相位拟合软件对该误差进行Zernike多项式拟合,从而很好地实现了坐标统一,并使非共路误差从相位分布中剔出。结合实例对一口径为350mm的非球面进行了拼接实验,并将拼接结果与零位补偿检测结果相对比,结果吻合,其PV值和RMS值的偏差分别为0.031l和0.005l(l=0.6328μm)。
Subaperture stitching interferometry can test large aspherical surfaces without the aid of any auxiliary null optics. But the phase data of each subaperture include non-common path error, and in order to accomplish the stitching, the CCD pixel coordinate of each subaperture should be unified to the coordinate of the mirror. A new method for calibrating the projection distortion by the fiducial module was proposed, and the non-common path error was simulated and calculated by Zemax software and Zernike polynomial fitting. The stitching experiment was carried on with three subapertures for a hyperboloid. The synthesized surface map is consistent to the entire surface map from the null test and the differences of PV and RMS error between them are 0.031 λ and 0.005 λ（λ=0.6328μm）, respectively.
出处
《激光与光电子学进展》
CSCD
北大核心
2009年第1期51-55,共5页
Laser & Optoelectronics Progress
基金
中国科学院长春光学精密机械与物理研究所三期创新基金资助项目
关键词
光学技术
环形子孔径拼接
非共光路误差
投影畸变
最小二乘拟合
optical technique
annular subaperture stitching
non-common path error
projection distortion
leastsquares fitting
