摘要
为深入探讨微加热器表面产生周期性气泡的普遍规律,需要对微加热器的温度响应和分布进行研究.对微加热器和周围液体工质进行了无量纲固液耦合传热分析,以铂金属薄膜微加热器和液体工质水为例,通过对瞬态能量方程的理论分析和数值模拟,发现产生周期性气泡所需的无量纲加热时间与金属膜的厚度无直接关系,而与无量纲热源值密切相关;对周期性电压方波脉冲加热方式和周期性电流脉冲加热方式进行了对比,认为电压方波脉冲加热方式更符合实验需求;另外还提出了金属表面液膜的过热液层厚度和加热影响区.
The thermal response and distribution of microheaters were studied to further investigate the law of periodic bubble generation on the surface of microheaters, and dimensionless solid-liquid coupling heat conduction concerning microheaters and the surrounding liquid was thus analyzed. Based on the example of Pt film as the heating resister and water as the working liquid, it is concluded that the dimensionless time does not relate to the thickness of film heater, but varies with the dimensionless value of volume heating resource. Compared with current heating pulse, quadratic voltage heating pulse is more liable to incite periodic bubbles and more applicable as well. Besides, the thickness of superheated liquid layer and the affected zone was defined and discussed.
基金
国家自然科学基金(50776089)
广东省自然科学基金(7000742)资助
关键词
微加热器
无量纲
数值模拟
气泡生长
温度响应
microheater
dimensionless
numerical simulation
bubble growth
thermal response
