摘要
对半导体制造设备的预维修调度问题进行了研究,建立了半导体制造设备预维修调度的数学模型,分别提出了用于求解该问题的启发式方法和粒子群算法方案,阐明了两种算法方案的具体实现过程。通过对仿真实例进行计算和结果比较,表明了粒子群算法优于启发式方法,取得了不错的优化效果。
The problem of predicted maintenance scheduling for semiconductor manufacturing equipment was studied in this paper. A math model was built based on the problem, and then the Binary Particle Swarm Optimization algorithm （BPSO） was used for solving the model. Finally a case study was simulated to demonstrate that the binary particle swarm optimization algorithm is better than First In First Out （FIFO） method.
出处
《工业工程与管理》
2008年第6期66-69,88,共5页
Industrial Engineering and Management
基金
上海市高校选拔培养优秀青年教师科研专项基金(29-017-2)
上海市重点学科建设项目(T0502)
关键词
半导体设备
预维修调度
二进制粒子群算法
先来先服务
semiconductor equipment
predicted maintenance scheduling
particle swarmoptimization
FIFO
