摘要
采用双流体动力学模型，考虑带电粒子的连续方程和泊松方程，利用数值方法研究了低气压等离子体放电条件对电离系数的影响．结果发现，当放电条件发生改变时，阴极区和阳极区α随放电电流和气体压强变化的规律有很大差别。
By using the hydrodynamic model and taking the continuity equations of charged particles and the Poissons equation into consideration, the influence of the discharge conditions of low pressure plasma on the ionization coefficient α is studied with numerical method. The results show that the ionization coefficient α varies with the discharge current and gas pressure, the variation in the cathode region being different from that in the anode region. The influence of the discharge conditions on the ionization coefficient α in the cathode region is much stronger than that in the positive column.
出处
《华中理工大学学报》
CSCD
北大核心
1997年第A01期67-69,73,共4页
Journal of Huazhong University of Science and Technology
基金
国家自然科学基金
关键词
气压
等离子体放电
电放系数
气体放电
low pressure plasma discharge
ionization coefficient
hydrodynamic model
current density
gas pressure
