摘要
采用磁控溅射法在PET非织造布上制备了不同厚度的纳米结构Ag薄膜,用高度相关函数法对薄膜的原子力显微镜(AFM)图像进行分形维计算,用AFM分析不同厚度纳米结构Ag薄膜形貌及粒径的变化;用网络测试仪测试了不同厚度样品的电磁屏蔽效能。结果表明,随着薄膜厚度的增加,薄膜表面质量提高,分形维增大;电磁屏蔽效能也随分形维的增大而增加。可以认为,分形维能有效地表征薄膜的表面形貌,分形维与导电及屏蔽效能存在明显的对应关系,并可以用分形维优化磁控溅射的工艺条件。
To study the surface morphologies and electromagnetic shielding properties of PET nonwovens deposited with nanostructured silver films, magnetron sputter coating technology was applied to sputter nanostructured silver films of different thicknesses on PET nonwovens. Atomic Force Microscope （AFM） images of samples were employed to calculate the fractal dimension by height correlation function, and which were also applied to analyze the surface morphology of the silver film and the grain sizes of the silver particles. The electromagnetic shield properties of films with different thicknesses were tested by the network analyzer. The test results indicate that the film surface quality and fractal dimension increase as the film thicknesses added; meanwhile, the electromagnetic shielding properties also enhance. Therefore, it is believed that a obvious coincidence relation of fractal dimension and conductive with electromagnetic shielding properties is existed. Fractal dimension can characterize the film surface morphology effectively, and which can also be employed to optimize the technical parameter of magnetron sputter.
出处
《高分子材料科学与工程》
EI
CAS
CSCD
北大核心
2008年第11期119-121,125,共4页
Polymer Materials Science & Engineering
基金
教育部博士点专项基金项目(20060295005)
生态纺织教育部重点实验室开放基金(LET0618)
关键词
分形
纳米银薄膜
表面形貌
屏蔽效能
磁控溅射
fractal
nanostructured silver film
surface morphologies
shielding properties
magnetron sputter
