摘要
An implantable seven-channel silicon microelectrode was fabricated by MEMS （micro-electro-mechanical system） micromachining techniques for optic-nerve visual prosthesis applications. Theoretical analyses of noise contributed to determining the size of the exposed recording sites of the microprobe. The geometry configuration was optimized for the silicon microprobe to have enough strength and flexibility and to reduce the insertion-induced tissue trauma. Impedance test results showed that the average value of the channels was 2.3MΩ at lkHz when applied with a stimulating voltage with the amplitude of 50mVpp,which is suitable for neural signal recordings. In-vivo animal experiment showed that the recorded neural signal amplitude from the primary visual cortex was 8μV.
采用微机电系统(MEMS)工艺方法制作了基于SOI衬底的七通道硅微电极,用于视神经视觉修复.通过噪声分析确定了硅微电极的金属暴露位点的几何尺寸.优化设计了硅微电极的几何结构,以便于减小植入损伤.阻抗测试结果表明,当测试电压为50mVpp时,1kHz频率下,微电极的单通道阻抗为2.3MΩ,适用于神经电信号记录.在体实验结果表明,动物初级视皮层记录到的神经电信号幅度为8μV.
基金
the National Natural Science Foundation of China(No.30700217)~~
