摘要
在大面积洁净室内引入SMIF/微环境系统能在更好的满足工艺洁净等级的要求下,起到节能的效果。分析总结了影响SMIF/微环境系统的主要参数以及提出了这些参数的建议取值范围、具体分析了在引入SMIF/微环境系统后所带来的节能效果(通过降低微环境内的风机能耗以及系统内气流组织的优化,其最大节能效果可达60-86%)。
the application of mini-environment(standard-mechanical interface) enclosure cleartroom may not only maintain a level of stringent cleanliness, but also offer opportunities in energy saving. The purpose of this paper is to summarize the major parameters which influence the SMIF/mini environment and analyze the magnitudes of potentiai energy saving (up to 60-86%) by integrating SMIF/mini environments in traditional cleanroon with optimal designing and reducing the eleetricai power demand of fan filter.
出处
《制冷与空调(四川)》
2008年第5期112-115,108,共5页
Refrigeration and Air Conditioning
关键词
SMIF
微环境
洁净室
洁净标准
电量密度
SMIF
mini-environment
cleanroom
cleanliness
elactrical power demand